Qualitative Simulation of Semiconductor Fabrication

Mohammed and Simmons. "Qualitative Simulation of Semiconductor Fabrication." AAAI Conference on Artificial Intelligence, 1986.

[Mohammed and Simmons. "Qualitative Simulation of Semiconductor Fabrication." AAAI Conference on Artificial Intelligence, 1986.](https://mlanthology.org/aaai/1986/mohammed1986aaai-qualitative/)

@inproceedings{mohammed1986aaai-qualitative,
  title     = {{Qualitative Simulation of Semiconductor Fabrication}},
  author    = {Mohammed, John and Simmons, Reid G.},
  booktitle = {AAAI Conference on Artificial Intelligence},
  year      = {1986},
  pages     = {794-799},
  url       = {https://mlanthology.org/aaai/1986/mohammed1986aaai-qualitative/}
}