Chen et al. "Intelligent OPC Engineer Assistant for Semiconductor Manufacturing." AAAI Conference on Artificial Intelligence, 2025. doi:10.1609/AAAI.V39I22.34479
Markdown
[Chen et al. "Intelligent OPC Engineer Assistant for Semiconductor Manufacturing." AAAI Conference on Artificial Intelligence, 2025.](https://mlanthology.org/aaai/2025/chen2025aaai-intelligent/) doi:10.1609/AAAI.V39I22.34479
BibTeX
@inproceedings{chen2025aaai-intelligent,
title = {{Intelligent OPC Engineer Assistant for Semiconductor Manufacturing}},
author = {Chen, Guojin and Yang, Haoyu and Yu, Bei and Ren, Haoxing},
booktitle = {AAAI Conference on Artificial Intelligence},
year = {2025},
pages = {23144-23151},
doi = {10.1609/AAAI.V39I22.34479},
url = {https://mlanthology.org/aaai/2025/chen2025aaai-intelligent/}
}