ML Anthology

Scanning Electron Microscope Based Stereo Analysis [for Semiconductor IC Inspection]

Ali E. Kayaalp, A. Ravishankar Rao, Ramesh C. Jain
CVPR 1989 pp. 429-434
doi:10.1109/CVPR.1989.37882 /cvpr/1989/kayaalp1989cvpr-scanning/
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Cite

Text

Kayaalp et al. "Scanning Electron Microscope Based Stereo Analysis [for Semiconductor IC Inspection]." IEEE/CVF Conference on Computer Vision and Pattern Recognition, 1989. doi:10.1109/CVPR.1989.37882

Markdown

[Kayaalp et al. "Scanning Electron Microscope Based Stereo Analysis [for Semiconductor IC Inspection]." IEEE/CVF Conference on Computer Vision and Pattern Recognition, 1989.](https://mlanthology.org/cvpr/1989/kayaalp1989cvpr-scanning/) doi:10.1109/CVPR.1989.37882

BibTeX

@inproceedings{kayaalp1989cvpr-scanning,
  title     = {{Scanning Electron Microscope Based Stereo Analysis [for Semiconductor IC Inspection]}},
  author    = {Kayaalp, Ali E. and Rao, A. Ravishankar and Jain, Ramesh C.},
  booktitle = {IEEE/CVF Conference on Computer Vision and Pattern Recognition},
  year      = {1989},
  pages     = {429-434},
  doi       = {10.1109/CVPR.1989.37882},
  url       = {https://mlanthology.org/cvpr/1989/kayaalp1989cvpr-scanning/}
}